(November 2, 2026) New developments have been made in the field of domestic vacuum materials. The new generation of high-purity vacuum diffusion pump oils have undergone process optimization and batch stability testing. With their lower saturated vapor pressure and excellent thermal oxidation stability, these oils can meet the stringent requirements for ultra-high vacuum environments in vacuum coating, metallurgical heat treatment, semiconductor device manufacturing, space simulation, and scientific research analysis equipment. This helps improve the quality and efficiency of the high-end vacuum industry chain through domestic production.

Vacuum diffusion pump oils are the core working media of diffusion pumps. They form a steam jet through high-temperature vaporization, capturing gas molecules within the chamber, thereby creating high and ultra-high vacuum conditions. The purity, re-oil rate, and thermal stability of the oil directly determine the maximum vacuum level and production efficiency of the vacuum system. It is also a crucial component in precision vacuum processes. The optimized products are divided into two categories: mineral-based and silicone-based oils. The silicone-based version corresponds to specifications 704 and 705. Its molecular structure has been purified through distillation, ensuring that impurities and gas emissions are controlled. Over time, it does not easily decompose or accumulate carbon deposits, thereby reducing the risk of re-oil contamination. This makes it suitable for processes that require high cleanliness levels, such as optical coating and electronic component evaporation. Conventional mineral-based diffusion pump oils provide stability and cost advantages, making them suitable for industrial applications such as vacuum smelting and vacuum heat treatment.

According to industry reports, the global diffusion pump oil market is growing steadily. The production of semiconductors, display panels, and new energy coatings continues to expand, leading to increased demand for high-purity vacuum materials. There is a growing need for domestic diffusion pump oils that have low emission, long lifespan, and reliable supply. In the past, many high-end ultra-high vacuum applications relied on imported oils, which posed challenges related to supply chain cycles, procurement costs, and delivery times. Domestic manufacturers are continuously improving their processes, such as molecular distillation, deep degassing, and purification, to narrow the performance gap with foreign products. Some specifications have been tested by various vacuum equipment integrators and coating factories over a long period; their ability to maintain ultra-high vacuum levels and pump speed meets the standards for replacement.

Technical experts say that compared to previous models, the new diffusion pump oils have better temperature adaptability, improved resistance to oxidation under high temperatures, longer oil lifespan, and reduced need for equipment downtime and maintenance. Additionally, production processes have been optimized to ensure better batch consistency, minimizing fluctuations in vacuum parameters caused by differences between batches. The products come with comprehensive test reports and MSDS documents, which facilitate evaluation of samples for foreign trade orders. They also meet the compliance requirements of domestic and overseas coating, metallurgy, and research institutions.

Industry professionals believe that vacuum is a fundamental condition for advanced manufacturing. Continued advancements in specialized fluid materials like diffusion pump oils are essential for the localization of vacuum equipment. Future research will focus on developing silicon-free polyphenylene ether-based ultra-high vacuum oils and low-VOC environmentally friendly formulations. These materials will be suitable for highly clean environments such as semiconductors and molecular beam epitaxy. This will help create a full range of high-vacuum materials in China, supporting the self-sufficiency of the vacuum equipment industry.