Domestic vacuum diffusion pump oil technology iteration accelerates, and import substitution in high-end vacuum fields for semiconductors and photovoltaics continues to deepen
Hits: 103
img
(August 31, 2026) A domestic specialty silicone material company has completed batch validation of its new generation high-purity vacuum diffusion pump oil. Relying on molecular distillation deep purification technology, the product has been optimized and upgraded in key indicators such as extreme vacuum, oil return resistance, and high-temperature thermal stability. It can benchmark against mainstream international grades like DC704 and DC705, is compatible with various domestic and international oil diffusion pump equipment, and helps accelerate the independent and controllable process of the domestic high-end vacuum media supply chain.
Vacuum diffusion pump oil is the core working medium of oil diffusion vacuum pumps. The performance of the oil directly determines the vacuum system's ultimate vacuum degree, extraction efficiency, and finished coating yield. It is widely used in semiconductor thin film processes, photovoltaic HJT/TOPCon vacuum deposition, optical coating, vacuum metallurgy, electron beam processing, and spatial simulation laboratories.
Industry research data shows that in 2026, the expansion of domestic semiconductor and photovoltaic industries will drive steady growth in demand for high-vacuum consumables, while downstream manufacturing continues to raise requirements for diffusion pump oil purity, low volatility, and resistance to high-temperature coking. Newly built wafer production lines have shifted indicators such as total metal impurity content and saturated vapor pressure from high-end selection to mandatory entry requirements. In the past, the high-end market was long dominated by overseas brands, facing pain points such as long delivery cycles and large fluctuations in procurement costs. With increased domestic investment in material R&D, phenyl-based diffusion pump silicone oil products are less likely to crack and coke during long-term high-temperature operation, significantly reducing oil return rates, which can reduce pollutant deposition in vacuum chambers and gradually gain recognition from leading downstream manufacturers.
Market analysis points out that in 2026, the domestic vacuum diffusion pump oil market will show two major trends: on one hand, the penetration rate of high-purity synthetic diffusion pump oil continues to rise, and the proportion of traditional mineral-based oils continues to shrink; On the other hand, besides large tonnage orders, demand for small-batch repackaging procurement in laboratories and small to medium trial production lines is growing significantly, and the supply model for small sizes of 1L-5L is gradually becoming widespread, reducing inventory pressure during R&D and trial production stages.
Industry insiders say that with the iteration of advanced semiconductor processes and the expansion of the AR/VR optical coating industry, the market space for high-cleanliness vacuum media will be further unlocked. Local manufacturers need to continuously strengthen batch stability, compliance certification support, and on-site technical services to further narrow the gap with top overseas products and tap into incremental opportunities in domestic and international foreign trade markets.