(July 3, 2026) Recently, a key breakthrough has been made in the domestic high-end vacuum fluid materials sector. A high-performance silicone vacuum diffusion pump oil independently developed by a local company has completed full-condition performance verification and industrialization. Its core indicators fully benchmark against top international products, completely breaking decades of market and technology monopolies of overseas brands, and laying a crucial foundation for independent control of China's supply chains for high-end manufacturing industries such as semiconductors, aerospace, and precision coatings.
Vacuum diffusion pump oil is a core consumable in ultra-high vacuum systems. With excellent properties such as extremely low vapor pressure, thermal oxidation stability, and radiation resistance, it is an indispensable key material in cutting-edge fields such as vacuum coating, semiconductor wafer manufacturing, aerospace environment simulation, and precision instrument inspection. For a long time, the global high-performance vacuum diffusion pump oil market has been firmly controlled by overseas companies such as Dow Corning and Shin-Etsu. The domestic high-end sector has long relied on imports, resulting not only in high procurement costs but also in issues such as long delivery cycles, poor customization adaptability, and supply chain instability, which have become key shortcomings restricting the localization of China's high-end vacuum equipment.
Relying on years of polymer material R&D experience, domestic research teams and enterprises have jointly tackled key challenges, breaking through core technologies such as precise regulation of high-purity siloxane molecules, low-impurity purification and purification, and stable formulation optimization, successfully launching a series of domestic high-end silicone diffusion pump oil products such as UC740 and UC750. According to tests by authoritative institutions, this series of products boasts core advantages such as steep vapor pressure curves, low freezing point, high temperature resistance, oxidation resistance, and stable vacuum levels. Key performance indicators such as ultimate vacuum, pumping rate, and service life fully meet international standards for similar high-end products. It can fully replace mainstream imported diffusion pump oils such as 704, 705 series, and CVC-4, meeting the all-scenario operational needs of various high-end diffusion pump equipment.
Compared to imported products, the newly launched domestic vacuum diffusion pump oil demonstrates multiple industrial advantages. In terms of performance, the product uses a single-component refining process with extremely low impurity content, making it difficult to crack and contaminate cavities easily during long-term high-temperature operation, effectively ensuring the stability of precision manufacturing processes. It is suitable for high-precision scenarios such as semiconductor production with processes of 28nm and above, high-end optical coating, and aerospace vacuum simulation experiments. In terms of cost and supply chain, domestic mass production has greatly reduced intermediate circulation costs, significantly improved product cost-effectiveness, and achieved rapid localized delivery, customized formula debugging, and round-the-clock technical support services, thoroughly solving industry pain points such as uncontrollable delivery times and delayed after-sales response for imported products.
Industry data shows that the vacuum diffusion pump oil market is maintaining a rapid growth trend. By 2025, the global silicone diffusion pump oil market size will reach $7.85 billion, and it is expected to continue expanding at a compound annual growth rate of 14.76% in the coming years; Domestically, by 2026, the market size of China's high-grade diffusion pump oil market is expected to reach 1.71 billion yuan, a year-on-year increase of 15.5%. Domestic domestic annual production capacity is expected to increase to 38,000 tons, up 12.5% year-on-year. With the acceleration of domestic substitution in semiconductors, the expansion of the photovoltaic new energy industry, and the upgrading of high-end precision manufacturing, the installed capacity of ultra-high vacuum equipment continues to climb, further driving rigid demand for high-end diffusion pump oil.
This breakthrough and industrialization of domestic vacuum diffusion pump oil technology represent an important microcosm of China's independent innovation in fine chemicals and high-end new materials. In the future, as products continue to iterate, upgrade, and scale up, the production costs of domestic high-end vacuum equipment will be further reduced, enhancing supply chain security and core competitiveness in industries such as semiconductors, aerospace, and precision optics, and supporting high-quality, independent development of high-end manufacturing industries.
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