July 2, 2026 Industry News As a core consumable for ultra-high vacuum equipment, vacuum diffusion pump oil is widely used in advanced semiconductor processes, optical coatings, aerospace, precision instruments, and other high-end manufacturing fields. It is a key foundational material supporting the development of the vacuum industry. Since 2026, the domestic diffusion pump oil industry has experienced both technological iteration and market expansion. Local companies have continuously overcome high-end technology barriers, with many domestic products achieving import benchmarking and substitution, completely breaking the long-standing monopoly of overseas brands. The trend toward localization, high-end, and green development in the industry is becoming increasingly clear.
It is reported that the domestic high-end vacuum diffusion pump oil market was long monopolized by overseas giants. High-performance diffusion pump oils required for ultra-high vacuum conditions in semiconductors and aerospace sectors were heavily dependent on imports, resulting not only in high procurement costs but also in issues such as unstable supply chains and long supply cycles, which to some extent restricted the independent development of China's high-end vacuum equipment industry. With the continuous increase in domestic new material R&D, local companies are deepening their core technologies for silicone diffusion pump oil, achieving leapfrog breakthroughs in key indicators such as thermal stability, oxidation resistance, ultra-low vapor pressure, and vacuum stability.
By the end of June 2026, two high-end silicone vacuum diffusion pump oils, UC740 and UC750, launched by domestic new materials companies, completed mass production and industry certification. Their product performance fully aligns with international mainstream benchmark products and is perfectly suited for industrial ultra-high vacuum production scenarios. This series of products uses a single-component, high-purity synthetic formula with excellent resistance to high temperatures, oxidation, and radiation. Under long-term high-temperature operation, it is not easily cracked or volatile, maintaining a stable high vacuum environment, effectively reducing equipment wear and extending maintenance cycles, and is suitable for high-end scenarios such as semiconductor coating, precision vacuum smelting, and aerospace component inspection, thoroughly solving the industry pain points of traditional domestic diffusion pump oil vacuum, easy oxidation, and short lifespan.
In addition to technological breakthroughs, the domestic vacuum diffusion pump oil industry market size will continue to steadily rise in 2026. Industry monitoring data shows that benefiting from the expansion of advanced domestic semiconductor processes, the acceleration of the commercial aerospace industry, the popularization of new energy vacuum processes, and the concentrated release of maintenance and renewal demand for aging industrial equipment, the domestic vacuum diffusion pump oil market is expected to maintain steady growth this year, with the overall market size expected to exceed 1.7 billion yuan, maintaining a year-on-year growth rate of over 15%. From the capacity side, domestic diffusion pump oil annual capacity is expected to reach 38,000 tons by 2026, a 12.5% increase over 2025. Leading companies are continuously expanding and upgrading production lines, effectively filling the supply gap for high-end products.
From a global market perspective, the silicone vacuum diffusion pump oil market is showing strong growth momentum, reaching $7.85 billion by 2025. It is expected to continue expanding at a compound annual growth rate of 14.76% in the coming years. The ongoing expansion of downstream ultra-high vacuum application scenarios provides lasting momentum for industry development. Meanwhile, the ongoing deepening of China's "15th Five-Year" green manufacturing policies has also accelerated the elimination of non-standard, blended, high-loss, low-end products in the diffusion pump oil industry, forcing the industry to upgrade toward higher purity, environmental protection, long-term performance, and higher performance.
Industry experts analyze that 2026-2028 will be a key window for domestic substitution in the vacuum diffusion pump oil industry. On one hand, domestic wafer fabs continue to expand production, commercial space launches are being intensively implemented, and the demand for high-end vacuum consumables keeps being released; On the other hand, local companies are increasingly mature in technology, production capacity, and certification systems. Compared to imported products, they offer core advantages such as high cost-performance, short supply cycles, and localized after-sales service, gradually gaining recognition from leading downstream manufacturers. In the future, as core technologies continue to iterate and the industry chain is coordinated and improved, domestically produced high-end vacuum diffusion pump oils are expected to keep capturing the import market share, promoting independent and controllable operation across China's vacuum equipment industry chain.
At the same time, the industry faces challenges in standardized development. Currently, some small manufacturers continue to disrupt market order by mixing non-standard base oils with inferior ones and passing off inferior ones. As industry standards continue to improve and downstream terminal procurement thresholds rise, outdated low-end capacity will be cleared out more rapidly, and the industry will enter a deep integration phase driven by technology and quality as king, further highlighting the competitive advantages of leading domestic enterprises.
