(October 19, 2026) In the field of vacuum functional materials, continuous technological advancements have been achieved. High-performance vacuum diffusion pump oils have passed multiple batches of stability tests. Their performance in maintaining extreme vacuum levels and resisting high temperatures and decomposition is continuously improved. These products are being used more widely in applications such as semiconductor thin-film deposition, optical coating, and precision scientific research instruments. The process of making domestic alternatives for high-end vacuum components is also being advanced.

Vacuum diffusion pump oil is a crucial component in ultra-high vacuum systems. When the pump operates, the oil evaporates due to heat, forming a high-speed vapor stream that captures gas molecules within the vacuum chamber. This process helps create a high-vacuum environment. The quality of the oil directly affects the maximum vacuum level, the degree of oil contamination, and the operational lifespan of the entire vacuum equipment. There are mainly two types of vacuum diffusion pump oils available on the market: mineral oil-based and silicone oil-based. Phenyl methyl silicone oil-based diffusion pump oils are preferred in high-end manufacturing applications because they have a very low saturated vapor pressure at room temperature, excellent chemical inertness, and thermal stability. They can operate reliably at temperatures up to 250°C without easily decomposing, thereby reducing the risk of hydrocarbon contaminants entering the vacuum chamber.

The expansion of high-end industries downstream is driving the need for higher-quality diffusion pump oils. Applications such as semiconductor wafer coating, optical component evaporation, aerospace environment simulation, transmission electron microscopes, and mass spectrometry instruments require extremely high cleanliness standards for vacuum chambers. Traditional mineral-based diffusion pump oils are prone to decomposition under prolonged high-temperature conditions, leading to organic impurity contamination of the workpieces and affecting product yield. In contrast, high-purity silicone oil-based diffusion pump oils have low impurity levels and controllable oil return, which effectively reduces the risk of workpiece contamination, extends the cleaning and maintenance period of the vacuum chamber, and minimizes downtime in production lines.

According to industry research, the domestic vacuum diffusion pump oil market is growing steadily. In the past, high-end ultra-high vacuum applications relied heavily on imported oils. However, local material manufacturers have continuously improved their purification processes, resulting in better batch consistency of domestic products. Many models have also obtained international compliance certifications such as REACH. The market penetration of domestic products is increasing, and export orders are also rising.

Current research and development efforts focus on three main areas: reducing oil return rates, extending the service life of oils, and improving resistance to high-temperature aging. Industry experts say that approximately 70% of vacuum system failures are related to the aging of the pump oil. Using high-quality diffusion pump oils can reduce the frequency of equipment maintenance and lower overall production costs for companies. At the same time, buyers are becoming more concerned about the environmental compatibility of products, supply chain stability, and comprehensive compliance documentation.

Industry experts believe that vacuum diffusion pump oil is a key component in the vacuum equipment industry that has a significant impact despite being a relatively small material. As the semiconductor, optoelectronics, and new material research industries in China continue to grow, demand for high-purity vacuum materials will continue to increase. Local material companies will continue to improve their formulations and production processes. This will help ensure the autonomy of the domestic vacuum industry, while also enabling them to expand their B2B markets overseas and compete in the global vacuum materials market.