(August 24, 2026) Domestic specialty silicone material companies have completed the development of a new generation of high-purity phenyl-type vacuum diffusion pump oils. Through multi-stage molecular distillation purification processes, these products have been improved in key parameters such as extreme vacuum levels, anti-reflux properties, and thermal stability at high temperatures. They are suitable for use in high-vacuum applications such as semiconductor manufacturing, optical coating, vacuum metallurgy, electron beam processing, and space simulation systems, thereby accelerating the process of replacing imported high-end vacuum media with domestically produced products.

Vacuum diffusion pump oils are the core working medium of oil-based diffusion pumps. The performance of these oils directly determines the extreme vacuum level, pumping speed, and yield of coated products or chip manufacturing processes in a vacuum system. They are essential specialty chemicals in the field of precision manufacturing. The new generation of silicon-based diffusion pump oils are colorless and transparent liquids with extremely low saturated vapor pressure. They do not easily decompose or form soot during prolonged high-temperature operation, significantly reducing the rate of oil backflow and minimizing the accumulation of contaminants in the vacuum chamber. Their performance is comparable to international standard models like DC704 and DC705, and they can be directly used in domestic and foreign diffusion pump equipment.

Market research data shows that the market size for domestic vacuum diffusion pump oils continued to grow in 2026. Demand increased due to the expansion of semiconductor equipment production, the growth of photovoltaic HJT/TOPCon production lines’ vacuum deposition needs, as well as the need for compliance upgrades in medical and food processing vacuum systems. This has led to a rapid increase in demand for high-purity, certified high-end diffusion pump oils. In 2026, the proportion of domestically produced diffusion pump oils reached 78.2%. However, there is still room for improvement in terms of ultra-high purity grades required for advanced semiconductors and aerospace simulations. Controlling metal ion impurities and ensuring long-term thermal stability remain key challenges in this industry.

Industry experts say that in the past, high-end diffusion pump oils relied heavily on foreign brands. In recent years, domestic material manufacturers have made continuous efforts in single-component synthesis, advanced distillation purification, and impurity control, gradually narrowing the gap with foreign products. Currently, downstream equipment manufacturers and research institutions are conducting long-term life testing of domestic oils. Some grades have already been tested in small quantities by semiconductor equipment and optical coating production lines.

From an application perspective, the proportion of traditional mineral-based diffusion pump oils is declining, while silicon-based, polyphenylene ether, and perfluoropolyether-based synthetic diffusion pump oils have become the mainstream. Different formulations are used for various applications such as ordinary industrial coating, ultra-high vacuum research, and highly corrosive processes. Downstream customers now require not only extreme vacuum parameters but also stable product batches, low impurity levels, long service life, and supporting technical services.

Looking ahead, as the production of semiconductors, commercial aerospace, high-end displays, and new energy technologies continues to expand, and the number of high-vacuum equipment units increases, the market for replacement of diffusion pump oils will continue to grow steadily. The next focus for the industry will be on further improving the ability to produce ultra-high purity raw materials independently, reducing dependence on foreign materials. Additionally, more products should be certified for use in semiconductor industries, enabling domestic diffusion pump oils to play a significant role in high-end supply chains.