The iteration and improvement of domestically produced high-purity vacuum diffusion pump oils help the semiconductor and coating industries overcome the limitations associated with high-vacuum consumables.

Hits: 135 img

(August 10, 2026) To meet the stringent requirements for ultra-high vacuum conditions in fields such as semiconductors, optical coatings, vacuum smelting, and scientific instruments, domestic high-performance vacuum diffusion pump oil has completed formula and refining process iterations, further optimizing saturation vapor pressure, thermal oxidation stability, and backflow resistance, accelerating the localization of key high-vacuum consumables.

Vacuum diffusion pump oil is the core working medium for achieving high and ultra-high vacuum in diffusion pumps. The oil performance directly determines the ultimate vacuum degree of the vacuum system and the stability of pumping, while also affecting the yield of coated workpieces and equipment maintenance cycles. Traditional mineral-type diffusion pump oil has a relatively high saturated vapor pressure, is prone to oxidation and cracking in high-temperature environments, suffers from oil return pollution, and has a short lifespan, making it increasingly difficult to meet current precision manufacturing process requirements. This iteration of synthetic vacuum diffusion pump oil is based on a high-purity phenyl silicone oil system, and through molecular distillation purification processes, effectively removes light component impurities. The product appears as a colorless, transparent liquid with extremely low saturation vapor pressure, stably constructing ultra-high vacuum environments at the 10⁻⁷Pa level, significantly suppressing oil vapor backflow and reducing the risk of contamination of cavities and workpieces.

In terms of high-temperature tolerance, the new diffusion pump oil has improved thermal oxidation stability, allowing it to withstand the pump's high-temperature working environment for a long time, making it less prone to carbonization and coking, extending oil service life, and reducing oil change frequency and downtime maintenance costs for enterprises. The products are highly compatible with mainstream domestic and imported diffusion pump equipment, widely adaptable to diverse application scenarios such as optical coating, semiconductor device manufacturing, vacuum metallurgy, electron beam welding, mass spectrometry instruments, and spatial simulation devices.

According to industry research data, with the expansion of domestic semiconductor, photovoltaic coating, and high-end optical industries, the high vacuum consumables market continues to grow steadily, the market share of synthetic diffusion pump oils continues to rise, and local brands are gradually breaking the monopoly of overseas products in the high-end vacuum field. In the past, high-end diffusion pump oil was highly dependent on imports, with long supply cycles and high procurement costs. After years of technological breakthroughs, the key indicators of domestic products now align with international mainstream grades and can provide customized technical support, balancing performance and cost advantages.

Industry technical experts state that the purity and stability of vacuum consumables are the foundational guarantees for precision manufacturing. Future industry development will evolve toward ultra-high purity, long lifespan, low pollution, and green environmental protection. Downstream customers will no longer focus solely on basic vacuum parameters but will demand higher impurity content, batch stability, and environmental disposal performance. Domestic diffusion pump oil companies will continue to focus on formula optimization and purification process upgrades, improve product testing and COA factory quality control systems, and provide material support for independent and controllable domestic vacuum industry chains.

Recommend

    Online QQ Service, Click here

    QQ Service

    What's App