The performance of domestically produced, high-performance vacuum diffusion pumps, which utilize silicone oil, has been improved, facilitating the acceleration of the import substitution process within the high-vacuum industry chain.

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(August 3, 2026) Recently, a domestic specialty silicone material R&D company officially launched a new generation of high-purity vacuum diffusion pump silicone oil products. Relying on refined molecular distillation and purification processes, the product has optimized and iterated key indicators such as extreme vacuum, reflux resistance, and high-temperature stability. It can be fully adapted to high-vacuum conditions such as optical coating, semiconductors, vacuum metallurgy, electron beam processing, and spatial simulation laboratories, further advancing the localization of high-end vacuum dielectric materials.

Vacuum diffusion pump oil is the core working medium of oil diffusion vacuum pumps. The performance of the oil directly determines the vacuum system's ultimate vacuum degree, pumping efficiency, and finished coating yield. The upgraded silicone oil for phenyl-based diffusion pumps appears as a colorless, transparent liquid, with extremely low saturation vapor pressure and excellent thermal stability. Long-term high-temperature operation is not prone to cracking and coking, with significantly reduced oil return rates and effectively minimizing contaminant deposits inside the vacuum chamber. The products can be compared to mainstream international diffusion pump oils such as DC704, DC705, and HIVAC F-4/F5, and are directly compatible with domestic and international diffusion pump equipment brands.

With the expansion of domestic photovoltaic HJT/TOPCon cell production, the development of the optical AR/VR coating industry, and continuous upgrades in semiconductor thin-film processes, market demand for clean, high-vacuum consumables keeps rising. Industry data shows that in 2026, domestic demand for silicone oil supporting high vacuum equipment will continue to grow steadily. Downstream manufacturers continue to seek stable, cost-effective domestic substitution solutions, overcoming pain points such as long import delivery times and large fluctuations in procurement costs.

On-site test data shows that the continuous operating cycle of this new diffusion pump silicone oil is over 30% longer than conventional oils, reducing downtime and oil change frequency, helping manufacturers lower operation and maintenance costs. At the same time, product manufacturing adopts a closed-loop green synthesis process, with strict control over heavy metals and low molecular weight impurity content, meeting the ultra-high cleanliness requirements of precision optical and microelectronic components in vacuum environments.

The R&D leader introduced that the team continues to focus on optimizing the molecular structure of vacuum silicone oil. The next step is to develop a dedicated series of modified diffusion pump oils for ultra-high vacuum laboratories and high-radiation conditions, improving the product matrix across all levels from medium to ultra-high vacuum.

Several vacuum coating companies have completed small-batch trial feedback, and domestically produced diffusion pump silicone oil meets vacuum stability standards under mass production conditions, reducing overall operating costs by more than 20%. With the coordinated development of domestic vacuum equipment and special silicon materials, high-performance vacuum diffusion pump oils are expected to continue expanding their market share, helping to achieve independent control over the high-end manufacturing industry chain.

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