(July 30, 2026) Recently, a domestic specialty silicone material company completed an iterative optimization of its new generation of high-performance vacuum diffusion pump oil products, further improving three core indicators: extreme vacuum, thermal oxidation stability, and low oil return. The product can benchmark against mainstream international 704 and 705-grade diffusion pump oil products, providing stable localization solutions for semiconductor coating, optical thin films, vacuum metallurgy, and large-scale scientific vacuum equipment, accelerating the independent replacement of high-end vacuum consumables.
Vacuum diffusion pump oil is the core working medium of oil diffusion vacuum pumps. It is an indispensable key chemical material for achieving high and ultra-high vacuum environments. The oil performance directly determines the ultimate vacuum degree, pumping speed, and workpiece yield of vacuum systems. It is widely used in semiconductor manufacturing, optical coating, photovoltaic coating, vacuum smelting, aerospace simulation, electron microscopes, particle accelerators, and many other high-end scenarios. For a long time, the domestic ultra-high vacuum grade diffusion pump oil market was dominated by overseas brands. Downstream companies faced practical pain points such as long procurement cycles, supply fluctuations, and high costs, with demand for domestic substitution continuously surging.
The new generation diffusion pump oil after this iteration uses a single-component phenyl silicone oil refining process, with a narrow fraction range, extremely low saturation vapor pressure, excellent thermal stability and oxidation resistance under high-temperature conditions, and is less prone to cracking and coking during high-temperature operation. It effectively reduces oil return rates, quickly establishes high-ultra-high vacuum environments, reduces chamber contamination, lowers cold well dependency, effectively extends oil service life, decreases equipment downtime and oil change frequency, and helps enterprises lower overall operation and maintenance costs. The product is compatible with most mainstream oil diffusion pump models, meeting the needs of conventional industrial coating and large-scale vacuum heat treatment production, as well as some demanding scientific research and semiconductor-related working conditions.
Industry data shows that with domestic semiconductor capacity expansion, the continued development of the photovoltaic optics industry, and accelerated construction of commercial aerospace and large scientific facilities, the domestic high vacuum diffusion pump oil market has maintained steady growth, with localization rates increasing year by year. Downstream customers have shifted their purchasing approach from simply comparing unit prices to focusing more on the comprehensive cost of the entire oil lifecycle, supply stability, and supporting technical service capabilities.
Industry experts explain that the main challenges in producing high-end diffusion pump oil lie in raw material purification, component control, and impurity management. Even tiny impurities can cause poor vacuum levels, excessive oil return, and high-temperature decomposition, placing extremely high demands on distillation purification processes and quality control systems. At present, domestic products have established a foundation for large-scale application in mid-to-high-end scenarios, with some indicators reaching international standards. However, there is still room for further optimization for special diffusion pump oils designed for extremely harsh operating conditions.
A relevant company representative stated that they will continue to develop customized diffusion pump oil formulations for semiconductor special processes, highly corrosive conditions, and long-cycle continuous production scenarios, improve product testing and on-site application technical services, continuously narrow the gap with top international products, and provide material support for the domestic vacuum equipment industry chain's independent and controllable development.
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