Application of Diffusion Pump Oil in Semiconductor and Electronics Manufacturing

Scenario 1: Chip Fabrication (Etching, Deposition, Ion Implantation)
Requirements: A high vacuum environment of 10⁻⁴ to 10⁻⁸ Pa must be maintained to prevent gas molecules from interfering with plasma reactions or contaminating wafer surfaces.
Oil Type: Methyl silicone oil or phenyl silicone oil (extremely low vapor pressure, high-temperature resistance, and strong chemical inertness to avoid reactions with corrosive gases such as NF₃ and Cl₂).
Equipment: Dry etchers, PECVD (Plasma-Enhanced Chemical Vapor Deposition) systems.

Scenario 2: Electronic Component Packaging
Requirements: Low-vapor-pressure oil is essential for vacuum soldering and wire bonding to prevent organic volatiles from contaminating chips.
Oil Type: Ultra-high-vacuum-grade silicone oil (highly purified, vapor pressure < 10⁻⁹ Pa).